ANU ion implantation Lab

What we do

The ANU ion implantation Lab (iiLab) is a node of the NCRIS funded Heavy Ion Accelerator (HIA) Capability and operates within the Department of Electronic Materials Engineering in the Research School of Physics at the Australian National University.

The iiLab undertakes a broad range of research, ranging from fundamental studies of ion-solid interactions and materials science to device fabrication and prototyping.

The research is centred around the use of state-of-the-art accelerator facilities, including two ion-implanters (150 kV and 1.7 MV tandem) and a versatile ion-beam analysis facility (1.7 MV tandem). These are complemented by access to a broad range of other processing and characterisation tools available through ANU nodes of the Australian National Fabrication Facility (ANFF) and Microscopy Australia (MA).

The iiLab is funded by the ANU and the Australian Government’s National Research Infrastructure Strategy (NCRIS).

Ion beam facilities

Our world class facilities are availble for use by researchers and industry professionals

Ion implantation services

We can provide implantation as a service, providing flexibility of species, temprature, area, dose and energy ranging from 15 keV to 10 MeV

Users

Bookings

Visit our Booking System

Internal Resources

Visit our internal resources website

Acknowledgments

Please support our facility by including the following acknowledgement in any publications:
"We acknowledge access to NCRIS funded facilities and expertise at the ion-implantation Laboratory (iiLab), a node of the Heavy Ion Accelerator (HIA) Capability at the Australian National University."

Our Services

Ion Implantation

We offer a full range of ion-implantation services

Species: Most elements, except inert gases.
Energies: Ion energies in the range 15 keV to 10 MeV, depending on species.
Temperature: Samples can be heated or cooled during implantation.
Area: Wafers up to 150 mm (6”) diameter can be accommodated. Typical implant areas are of order 3cm x 3cm.

Facilities

1.7 MV NEC Tandem (5SDH) high-energy ion-implanter
150 kV ion-implanter with negative ion source
1.7 MV NEC Tandem RBS/ERDA beamline for ion-beam analysis

Cost

Price based on application. Please contact us to request a quote.

High-energy Ion-Implanter

1.7 MV NEC Tandem (5SDH) high-energy ion-implanter

Low-energy Ion-Implanter

150 kV ion-implanter with negative ion source

Ion-beam Analysis

1.7 MV NEC Tandem RBS/ERDA/PIXIE beamline for ion-beam analysis

Our Team

Professor Robert Elliman

Director

Rob Elliman is a Professor of Physics in the Research School of Physics at the Australian National University (ANU) and Director of the iiLab, an ANU node of the NCRIS Heavy-Ion Accelerator Capability.

Tom Ratcliff

Facility Manager

Tom Ratcliff is the Facility Manager of the iiLab and a researcher in the Research School of Physics, Australian National University. He completed his PhD in 2015 on the topic of ion implantation as a method for fabricating high efficiency silicon solar cells.

Tom Kitchen

Technical Officer

Tom provides technical support for the iiLab. He has a Fitting Machining Trade background and has completed an Advanced Diploma of Mechanical Engineering at Canberra Institute of Technology.

Get In Touch

Contact Details

Please contact us with any queries you might have.

Physical Address
Research School of Physics (Bldg 60), Garran Road, Acton
The Australian National University

Postal Address
iiLab, Department of Electronic Materials Engineering
Research School of Physics
Building #60, Mills Road
The Australian National University
Canberra ACT 2601 Australia

Courier Address
iiLab, Research School of Physics Store
West end of Garran Road
The Australian National University
Canberra ACT 2601 Australia

+61 2 6125 0362
or
+61 2 6125 0521

Email: iilab@anu.edu.au

Ion Implantation Lab