Providing ion implantation facilities & services to Australian & international researchersExplore Us
The ANU ion implantation Lab (iiLab) is a node of the NCRIS funded Heavy Ion Accelerator (HIA) Capability and operates within the Department of Electronic Materials Engineering in the Research School of Physics at the Australian National University.
The iiLab undertakes a broad range of research, ranging from fundamental studies of ion-solid interactions and materials science to device fabrication and prototyping.
The research is centred around the use of state-of-the-art accelerator facilities, including two ion-implanters (150 kV and 1.7 MV tandem) and a versatile ion-beam analysis facility (1.7 MV tandem). These are complemented by access to a broad range of other processing and characterisation tools available through ANU nodes of the Australian National Fabrication Facility (ANFF) and Microscopy Australia (MA).
The iiLab is funded by the ANU and the Australian Government’s National Research Infrastructure Strategy (NCRIS).
Our world class facilities are availble for use by researchers and industry professionals
We can provide implantation as a service, providing flexibility of species, temprature, area, dose and energy ranging from 15 keV to 10 MeV
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Please support our facility by including the following acknowledgement in any publications:
"We acknowledge access to NCRIS funded facilities and expertise at the ion-implantation Laboratory (iiLab), a node of the Heavy Ion Accelerator (HIA) Capability at the Australian National University."
We offer a full range of ion-implantation services
Price based on application. Please contact us to request a quote.
Please contact us with any queries you might have.